MT 522 The Science and Technology of Thin Films
This course deals with the principles and practices of thin-film deposition by physical and chemical methods, the processes and phenomena which influence the structural, chemical and physical attributes of films and how to characterize them, and assorted film properties. Special topics include epitaxy in semiconductor films, interdiffusion and reactions, film stress, electrical and magnetic properties, optical properties, surface modification by laser and ion-beam methods, and protective and metallurgical coatings.
Prerequisite
Graduate Student or At Least Junior