Skip to main content

Catalog Search

Search Options

Contents

About
Our History and Mission
Accreditation
Academic Integrity
Student Life
Student Services
Undergraduate Education
Graduate Education
Tuition, Fees and Other Expenses for Undergraduate Students
Tuition, Fees and Other Expenses for Graduate Students
Financing a Stevens Education
School of Business
College of Arts and Letters
Schaefer School of Engineering and Science
Department of Biomedical Engineering
Department of Chemistry and Chemical Biology
Department of Chemical Engineering and Materials Science
Department of Civil, Environmental, and Ocean Engineering
Department of Computer Science
Department of Electrical and Computer Engineering
Department of Mathematical Sciences
Department of Mechanical Engineering
Department of Physics
School of Systems and Enterprises (SSE)
Courses
- AAI - Applied Artificial Intelligence
- ACC - Accounting
- BIA - Business Intelligence and Analytics
- BIO - Biology
- BIOE - Bioengineering
- BME - Biomedical Engineering
- BT - Business and Technology
- CAL-College-of-Arts-Letters
- CE - Civil Engineering
- CH - Chemistry
- CHE - Chemical Engineering
- CLK - Clark Scholars
- CM - Construction Management
- COMM - Professional Communications
- CPE - Computer Engineering
- CS - Computer Science
- DE - Developmental English
- DS - Data Science
- EE - Electrical Engineering
- ELC - English Language and Communication
- EM - Engineering Management
- EMT - Executive Management of Technology
- EN - Environmental Engineering
- ENGR - Interdepartmental Engineering
- ES - Enterprise Systems
- FA - Financial Analytics
- FE - Financial Engineering
- FIN - Finance
- GEN - General Elective
- HAR - Humanities Art
- HHS - Humanities History
- HLI - Humanities Literature
- HMU - Humanities Music
- HONR - Honor Program
- HPL - Humanities Philosophy
- HSS - Humanities Social Sciences
- HST - Humanities Science and Technology Studies
- HTH - Humanities Theater
- HUM - Humanities General
- IDE-Innovation-Design-and-Entrepreneurship
- IPD - Integrated Product Development
- ISE - Industrial and Systems Engineering
- LCH - Language Chinese
- LFR - Language French
- LSP - Language Spanish
- MA - Mathematics
- ME - Mechanical Engineering
- MGT - Management
- MIS - Information Systems
- MT - Materials Engineering
  - 500
  - 600
  - 700
  - 800
  - 900
- NANO - Nanotechnology
- NE - Naval Engineering
- NIS - Networked Information Systems
- OE - Ocean Engineering
- PAE - Product Architecture and Engineering
- PEP-Physics-Engineering-Physics
- PIN - Pinnacle Scholar
- PME - Pharmaceutical Manufacturing
- QF - Quantitative Finance
- SEF-Science-Engineering-Found-for-Edu
- SES - Systems Engineering Security
- SM - Sustainability Management
- SOC - Service Oriented Computing
- SSW - Software Engineering
- SYS - Systems Engineering
- TE Technical Elective
- TG - Technogenesis
- TM - Telecommunications Management

Catalog Links

Print this page

MT 545 Plasma Processing

Basic plasma physics; some atomic processes; and plasma diagnostics. Plasma production; DC glow discharges and RF glow discharges; magnetron discharges. Plasma-surface interaction; sputter deposition of thin films; reactive ion etching, ion milling, and texturing; electron beam-assisted chemical vapor deposition; and ion implantation. Sputtering systems; ion sources; electron sources; and ion beam handling.

Credits

3

Cross Listed Courses

PEP 545

Prerequisite

Graduate Student or At Least Junior