ME 681 Applications of Advanced Micro/Nano Materials, Structures and Devices

The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano- Electro-Mechanical Systems (NEMS) to provide students with a strong background in the design and characterization of micro- and nano-scale sensors and actuators with a broad range of applications in VNT-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main focus is on the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems.




ME 573 and ME 581


Mechanical Engineering Program

Typically Offered Periods

Spring Semester